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Selective electroless plating-A new technique for GaAs MMICs

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3 Author(s)
Choudhury, D. ; Indian Inst. of Technol., Bombay, India ; Bhatgadde, L.G. ; Mahapatra, S.

A simple, cost-effective processing technique, selective electroless plating, is proposed for GaAs monolithic microwave integrated circuits (MMICs). Microwave measurements show that the attenuation properties of transmission lines fabricated by this processing technique are comparable to the attenuation properties of lines fabricated by the traditional evaporation lift-off technique

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:4 ,  Issue: 1 )