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Design automation of MEMS systems using behavioral modeling

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4 Author(s)
D. Gibson ; Dept. of Electr. Comput. & Eng. Comput. Sci., Cincinnati Univ., OH, USA ; C. Purdy ; A. Hare ; F. Beyette

We propose a behavioral approach to designing MEMS devices. This approach differs from much current research in that this approach would not require dimensional parameters for the device, but instead would require a high level, functional or behavioral description. This paper examines how such an approach would work using a case study of an optical processor manually designed using the MUMP's process

Published in:

VLSI, 1999. Proceedings. Ninth Great Lakes Symposium on

Date of Conference:

4-6 Mar 1999