A MEMS switch has been developed for microwave applications. The switch has an actuation of 30 V, a response time of 20 μs, and mechanical robustness to withstand 109 actuations. An RF performance with >50 dB isolation below 2 GHz and <0.2 dB insertion loss from DC to 40 GHz has been measured
Published in:
Electronics Letters
(Volume:35
,
Issue:
3
)
Date of Publication: 4 Feb 1999