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Precision positioning using a microfabricated electrostatic actuator

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4 Author(s)
D. A. Horsley ; Berkeley Sensor & Activator Center, California Univ., Berkeley, CA, USA ; N. Wongkomet ; R. Horowitz ; A. P. Pisano

This paper presents a microfabricated actuator designed for high precision servo-positioning in a magnetic hard disk drive. The device is actuated using electrostatic force generated with parallel-plate capacitive electrodes. The displacement of these electrodes is measured using a dedicated capacitive sensing interface, allowing closed-loop control to be used to extend the servo bandwidth. Using the sensing electronics and a simple phase-lead compensator, a prototype device was used to actuate a 1.6 mg ceramic slider over a 1.2 kHz bandwidth. Using optical position measurements, the same actuator was used to achieve a 2.5 kHz bandwidth

Published in:

IEEE Transactions on Magnetics  (Volume:35 ,  Issue: 2 )