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On the accuracy of generation lifetime measurement in high-resistivity silicon using PN gated diodes

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6 Author(s)
Verzellesi, G. ; Dipt. di Ingegneria dei Mater., Trento Univ., Italy ; Dalla Betta, G.-F. ; Bosisio, L. ; Boscardin, M.
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We show that in high-resistivity silicon bulk generation lifetime and surface generation velocity can not be measured with acceptable accuracy using a single gated diode, unless the gate length is suitably tailored. The accuracy with which bulk generation lifetime can be evaluated is, in particular, limited by nonidealities, contributing extra components to the gated-diode current, which are not accounted for in the standard extraction procedure

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Electron Devices, IEEE Transactions on  (Volume:46 ,  Issue: 4 )