The authors present high-frequency results of n-channel MODFETs fabricated on high-mobility Si/SiGe strained layer heterostructures grown by ultrahigh vacuum chemical vapour deposition (UHV-CVD). Devices with gate length Lg=0.2 μm and drain-source separation L ds=0.9 μm displayed unity current gain cutoff frequencies as high as fT=45 GHz (47 GHz) at Vds=+0.6 V (+1.5 V). Similar devices with Lg=0.2 μm and Lds=0.5 μm produced values of fT=61 GHz (62 GHz) at Vds=+0.6 V (+1.0 V). The value fT=62 GHz is the highest unity current gain cutoff frequency reported to date for an n-channel strained Si MODFET
Published in:
Electronics Letters
(Volume:35
,
Issue:
1
)
Date of Publication: 7 Jan 1999