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High-fT n-MODFETs fabricated on Si/SiGe heterostructures grown by UHV-CVD

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3 Author(s)
Koester, S.J. ; IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA ; Chu, J.O. ; Groves, R.A.

The authors present high-frequency results of n-channel MODFETs fabricated on high-mobility Si/SiGe strained layer heterostructures grown by ultrahigh vacuum chemical vapour deposition (UHV-CVD). Devices with gate length Lg=0.2 μm and drain-source separation L ds=0.9 μm displayed unity current gain cutoff frequencies as high as fT=45 GHz (47 GHz) at Vds=+0.6 V (+1.5 V). Similar devices with Lg=0.2 μm and Lds=0.5 μm produced values of fT=61 GHz (62 GHz) at Vds=+0.6 V (+1.0 V). The value fT=62 GHz is the highest unity current gain cutoff frequency reported to date for an n-channel strained Si MODFET

Published in:
Electronics Letters  (Volume:35 ,  Issue: 1 )

Date of Publication: 7 Jan 1999

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