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Optical raster-scanning displays based on surface-micromachined polysilicon mirrors

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2 Author(s)
Hagelin, P.M. ; Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA ; Solgaard, O.

We demonstrate high-resolution, raster-scanning display systems based on pairs of orthogonally scanning, surface-micromachined mirrors. The first mirror of the raster-scanning pair determines the line-scan rate of the display and is driven at its resonant frequency which is on the order of 4.7 kHz. The second mirror, driven at a frequency below its resonance and scanning orthogonally to the first mirror, determines the image refresh rate. Both mirrors have a maximum optical scanning angle of 15°. Single-chip and two-chip scanners are demonstrated. The resolution of the single-chip display, based on average pixel size, is 102×119 pixels. The curvature of the mirror surfaces are characterized and optically compensated to achieve this resolution

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:5 ,  Issue: 1 )