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We present a study of thermal effects in Smart Power Electrostatic Discharge (ESD) protection structures by application of a noninvasive infrared backside laserprober technique. The temperature increase in the device active area is obtained from the time resolved measurements of optical phase changes under ESD-like high current stress. Results of temperature distribution and thermal dynamics for different device operation modes are presented.
Date of Conference: 6-9 Dec. 1998