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Backside laserprober characterization of thermal effects during high current stress in smart power ESD protection devices

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8 Author(s)
Furbock, C. ; Inst. for Solid State Electron., TV Vienna, Austria ; Seliger, N. ; Pogany, D. ; Litzenberger, M.
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We present a study of thermal effects in Smart Power Electrostatic Discharge (ESD) protection structures by application of a noninvasive infrared backside laserprober technique. The temperature increase in the device active area is obtained from the time resolved measurements of optical phase changes under ESD-like high current stress. Results of temperature distribution and thermal dynamics for different device operation modes are presented.

Published in:

Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International

Date of Conference:

6-9 Dec. 1998