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Foundry technology for the next decade

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3 Author(s)
Sun, J.Y.C. ; Taiwan Semicond. Manuf. Co., Hsin-Chu, Taiwan ; Shang-Yi Chiang ; Liu, M.

Foundry technology has emerged from OEM to standard generic process in the past 10 years, and now to the leading edge for the next decade. This paper gives an overview of the present and future foundry technologies which are the foundation of the virtual fab for fabless, integrated device manufacturer (IDM), and system companies.

Published in:

Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International

Date of Conference:

6-9 Dec. 1998

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