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Monolithic integration of light emitting diodes, detectors and optical fibers on a silicon wafer: a CMOS compatible optical sensor

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4 Author(s)
Misiakos, I. ; Inst. of Microelectron., Nat. Centre for Sci. Res., Athens, Greece ; Tsoi, E. ; Halmagean, E. ; Kakabakos, S.

Silicon light emitting diodes, detectors and optical fibers are monolithically integrated on a Silicon wafer for sensor applications. The Silicon LEDs are avalanche diodes reverse biased beyond the breakdown voltage. The fiber is a Silicon Nitride waveguide which is self aligned to the light emitter and the detector junctions through proper TEOS spacers for efficient optical coupling. The potential of the device as a CMOS compatible monolithic optical sensor is demonstrated.

Published in:

Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International

Date of Conference:

6-9 Dec. 1998