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Silicon light emitting diodes, detectors and optical fibers are monolithically integrated on a Silicon wafer for sensor applications. The Silicon LEDs are avalanche diodes reverse biased beyond the breakdown voltage. The fiber is a Silicon Nitride waveguide which is self aligned to the light emitter and the detector junctions through proper TEOS spacers for efficient optical coupling. The potential of the device as a CMOS compatible monolithic optical sensor is demonstrated.
Date of Conference: 6-9 Dec. 1998