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New microstereolithography (Super-IH process) to create 3D freely movable micromechanism without sacrificial layer technique

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2 Author(s)
Maruo, S. ; Dept. of Micro Syst. Eng., Nagoya Univ., Japan ; Ikuta, K.

We present a drastically advanced microstereolithography named “Super IH process”. The most unique feature of this process is that liquid UV (Ultra Violet) polymer can be solidified at a pinpoint position in 3D space by optimizing apparatus and focusing condition of the laser beam. This pinpoint exposure enables us to make a real 3D microstructure without any support parts or sacrificial layers. Therefore freely movable micromechanisms such as gear rotators and free connected chains can be made easily. Moreover, several problems which conventional microstereolithography has are completely solved. Submicron fabrication resolution was achieved by simple desk top apparatus. Since total fabrication time of the super IH process is extremely fast, it is easy to apply to mass production 3D microfabrication process

Published in:

Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on

Date of Conference:

25-28 Nov 1998