Cart (Loading....) | Create Account
Close category search window
 

Imbalanced Mach-Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Porte, H. ; Lab. d''Optique, CNRS, Besancon, France ; Gorel, V. ; Kiryenko, S. ; Goedgebuer, J.-P.
more authors

This paper describes an interferometric pressure sensor designed to work as a remote sensor in a coherence modulation scheme, allowing a linear phase read-out of the signal. The sensor is realized from a silicon nitride waveguide Mach-Zehnder interferometer integrated on a (100) silicon substrate, and includes a micromachined membrane below a branch of the Mach-Zehnder. The characterization is achieved by a spectral analysis and shows a nonlinear relationship between the static pressure applied to the membrane and the phase variation thus obtained. The analytical description takes into account the induced deflection of the membrane and the resulting mechanical elongation of the waveguide

Published in:

Lightwave Technology, Journal of  (Volume:17 ,  Issue: 2 )

Date of Publication:

Feb 1999

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.