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Microfabricated chemical sensors for safety and emission control applications

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6 Author(s)
Hunter, G.W. ; NASA Lewis Res. Center, Cleveland, OH, USA ; Neudeck, Philip G. ; Liang-Yu Chen ; Knight, D.
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Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors; 2) the development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications

Published in:

Digital Avionics Systems Conference, 1998. Proceedings., 17th DASC. The AIAA/IEEE/SAE  (Volume:1 )

Date of Conference:

31 Oct-7 Nov 1998