By Topic

Semiconducting YBaCuO pyroelectric infrared detectors on suspended Si3N4 films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Gray, J.E. ; Dept. of Electr. Eng., Southern Methodist Univ., Dallas, TX ; Butler, D.P. ; Celik-Butler, Z.

Uncooled, micromachined pyroelectric infrared detectors based on semiconducting YBaCuO were fabricated and characterised at room temperature. The detectors were fabricated with CMOS compatible techniques that demonstrate a future ability to fabricate low-cost focal plane arrays. Pyroelectric coefficients were measured to be as high as 4.1 μC/cm2K and detectivities over 108·cm Hz1/2/W were measured

Published in:

Electronics Letters  (Volume:34 ,  Issue: 22 )