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Integrated optical structures grown by shadow masked MOCVD

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3 Author(s)
G. M. Peake ; Center for High Technol. Mater., New Mexico Univ., Albuquerque, NM, USA ; A. M. Sarangan ; S. D. Hersee

Free-space optical interconnects based on VCSEL arrays require passive optical elements to improve emitter-to-detector coupling, thereby reducing crosstalk between channels and allowing lower power operation. We will describe the fabrication and properties of high quality microlenses made using shadow-masked, metalorganic chemical vapor growth (SMMG). We will also describe how this technique could be extended to enhance spatial mode discrimination in large area VCSELs

Published in:

Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE  (Volume:2 )

Date of Conference:

3-4 Dec 1998