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Curve evolution models for real-time identification with application to plasma etching

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3 Author(s)
Berg, J. ; Dept. of Mech. Eng., Texas Tech. Univ., Lubbock, TX, USA ; Yezzi, A. ; Tannenbaum, A.

It is desirable, in constructing an algorithm for real-time control or identification of free surfaces, to avoid representations of the surface requiring mesh refinement at corners or special logic for topological transitions. Level set methods provide a promising framework for such algorithms. In this paper we present: 1) a mathematical representation of free surface motion that is particularly well-suited to real-time implementation; 2) a technique for estimating an isotropic and homogeneous normal velocity based on a simple measurement; and 3) an application to a semiconductor etching problem.

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Automatic Control, IEEE Transactions on  (Volume:44 ,  Issue: 1 )