Summary form only given. We have demonstrated an 8x8 VCSEL array flip-chip bonded to a dummy silicon chip that mimics the real CMOS driver IC by using Al metal lines and contact pads. All the bonded devices operated reliably, showing only a small variation in wavelength, threshold current and power output across the array. This demonstrates the suitability of this bonding technique for the integration of VCSEL arrays with high speed Si-based CMOS driver ICs
Published in:
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
(Volume:1
)
Date of Conference: 1-4 Dec 1998