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Electrostatic deposition of CVD particles for fabrication of ultrafine ceramic filter

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1 Author(s)
Yamamoto, H. ; Inst. of Ind. Sci., Tokyo Univ.

A novel method for forming a ceramic membrane was devised. Ultrafine particles of silicon nitride synthesized by thermally activated chemical vapor deposition (CVD) were deposited on an outer wall surface of a porous ceramic tube (substrate) by electrostatic force and sintered in an inert gas atmosphere. The ceramic-made electrode assembly using surface discharge was used for charging ultrafine particles at an elevated temperature. Special ceramic membranes with a three-dimensional network for use as a fiber filter were obtained by this method. The effective pore size was around 0.2-1.0 μm in diameter, and its porosity was extremely large. This structure has the advantage of allowing microfiltration with a very low pressure drop

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Industry Applications, IEEE Transactions on  (Volume:27 ,  Issue: 2 )