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Fast, zero-dimensional simulation of radio frequency glow discharges for quick estimates of fluorine concentrations

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2 Author(s)
J. T. P. Pender ; Dept. of Nucl. Eng. & Radiol. Sci., Michigan Univ., Ann Arbor, MI, USA ; M. L. Brake

A zero-dimensional model quickly estimates changes in species concentrations in CF4 radio frequency glow discharges. The code simulated experimental conditions of 100 mtorr and 5-20 W discharges. The results show that the simple model predicts actinometry results if the most accurate electron energy distribution function is used

Published in:

IEEE Transactions on Plasma Science  (Volume:26 ,  Issue: 5 )