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Integrated all-silicon color filtering element with an enhanced wavelength tunability

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1 Author(s)
Wolffenbuttel, R.F. ; Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands

A method for applying the wavelength-dependent response of silicon photodiodes for the integration of an electronically tunable optical filtering element with the photodetector in silicon is presented. Previous sensors suffered from a limited tunable spectral range. Here, the filter tunability is extended by enhancing the long-wavelength tunability using an extra implantation for realizing a higher doped buffer layer underneath a shallow junction to reduce the built-in depletion layer. Also, an independent electronically programmable short-wavelength cutoff is introduced. The latter is based on the control of the surface space-charge region. The flexibility obtained allows the electronic shaping of clearly distinguishable responses using a single photodiode.<>

Published in:

Electron Device Letters, IEEE  (Volume:9 ,  Issue: 7 )