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The reverse short channel effect (RSCE) is a major issue for deep-submicron CMOS technologies. In this paper, the RSCE is studied over a wide range of temperature (from 300 K down to 30 K). It is shown that the temperature lowering results in a significant reduction of the RSCE. Moreover, we show using these low temperature experiments that the RSCE arises from an excess doping concentration near the source and drain as supported from both analytical modeling and two-dimensional (2-D) numerical simulation.