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A 16-μA interface circuit for a capacitive flow sensor

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5 Author(s)
B. Rodgers ; Integrated Sensor Solutions, San Jose, CA, USA ; S. Goenawan ; M. Yunus ; Y. Kaneko
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A micropower interface circuit is described for fluidic flow measurement in commercial gas meters. The application-specific integrated circuit converts dynamic capacitive-flow sensor readings from 1 to 150 Hz into digital pulses suitable for reading by the host microcontroller. The signal path is first-order ΔΣ modulation followed by a three-pole, one-zero infinite impulse response bandpass filter. Analog signal processing is fully differential switched capacitor, with amplifiers and dc current consuming blocks operating in weak inversion. Chip bias and oscillator frequency, and capacitive sensor offset and gain, are trimmed with on-chip EEPROM. Operating ranges are 2.5-3.6 V and from -10 to 65°C, with active Idd of 16 μA

Published in:

IEEE Journal of Solid-State Circuits  (Volume:33 ,  Issue: 12 )