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Micromachined planar inductors on silicon wafers for MEMS applications

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2 Author(s)
Ahn, Chong H. ; Sch. of Electr. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Allen, M.G.

This paper describes three micromachined planar inductors (a spiral type, a solenoid type, and a toroidal meander type) with electroplated nickel-iron permalloy cores which have been realized on a silicon wafer using micromachining techniques. The electrical properties among the fabricated inductors are compared and the related fabrication issues are discussed, with emphasis on the low-temperature CMOS-compatible process, the high current-carrying capacity, the high magnetic flux density, the closed magnetic circuits, and the low product cost. The micromachined on-chip inductors can be applied for magnetic microelectromechanical systems devices, such as micromotors, microactuators, microsensors, and integrated power converters, which envisages new micropower magnetics on a chip with integrated circuits

Published in:

Industrial Electronics, IEEE Transactions on  (Volume:45 ,  Issue: 6 )

Date of Publication:

Dec 1998

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