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Experimental comparison of model-based and conventional pressure control for a plasma reactor

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2 Author(s)
Subawalla, H. ; Dept. of Chem. Eng., Texas Tech. Univ., Lubbock, TX, USA ; Rhinehart, R.R.

Pressure control in a plasma reactor system is used to experimentally compare nonlinear process-model-based-control, internal model control and conventional proportional-integral (PI) control. The experimental system consists of a single slice plasma etch reactor with an attached radio frequency generator and a vacuum pump. The RF discharge forms the plasma. The control system includes an one inch stepping motor powered butterfly type exhaust valve.

Published in:

American Control Conference, 1994  (Volume:3 )

Date of Conference:

29 June-1 July 1994