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Micromachining for terahertz applications

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3 Author(s)
Lubecke, V.M. ; RIKEN, Inst. of Phys. & Chem. Res., Saitama, Japan ; Koji Mizuno ; Rebeiz, G.M.

An overview of recent progress in the research and development of micromachined antennas, transmission lines, waveguides structures, and planar movable components for terahertz frequencies is presented. Micromachining is shown to provide a low-cost alternative to conventional (and very expensive) machined-waveguide technology, resulting in antennas with excellent radiation patterns, low-loss tuners, and three-dimensional (3-D) micromachined structures suitable for terahertz applications. Fabrication procedures for a variety of micromachined waveguide and planar structures are described here, along with measured terahertz performance. Applications of micromachining techniques for terahertz systems include focal-plane imaging arrays requiring a large number of elements and low-cost receivers for commercial and industrial applications such as pollution monitoring

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:46 ,  Issue: 11 )