CAD-oriented equivalent circuit modeling of on-chip interconnects in CMOS technology

A CAD-oriented modeling methodology for on-chip interconnects on lossy substrates in CMOS technology, which is based on quasistatic EM analysis and equivalent circuit model extraction, is presented. The frequency response of the equivalent circuit model shows good agreement with the computed quasi-static solution over the entire frequency range of interest. The model is further validated by comparison with the interconnect step response.