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Cobalt-manganese oxide thin films thermistors obtained by MOD

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2 Author(s)
Dragoi, V. ; Nat. Inst. of Mater. Phys., Bucharest, Romania ; Alexe, M.

Co1.4Mn1.6O4 (CMO) thin films were deposited onto silicon by Metalorganic Decomposition (MOD) method. Structure, composition and morphology were investigated by Electron Dispersive X-Ray Spectroscopy (EDX) and X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). Electrical measurements showed possible applications as negative temperature coefficient (NTC) thermistors

Published in:

Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International  (Volume:1 )

Date of Conference:

6-10 Oct 1998