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Yield management for development and manufacture of integrated circuits

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2 Author(s)
Koyama, H. ; JEOL Ltd., Tokyo, Japan ; Inokuchi, M.

The purpose of this paper is to outline a strategic element of yield management methodologies for the development and fabrication of advanced ULSI circuits. Fundamental ideas with regard to knowledge conversion and a detailed yield management system are described

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI

Date of Conference:

23-25 Sep 1998