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A framework for real-time process control. I. Data sampling and processing

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1 Author(s)
Rong, G. ; GenRad Inc., Westford, MA, USA

In this first of a series on frameworks for real-time process control, some measurement data fusion techniques and functions, including data sampling, filtering, processing and distribution, and random data generation, are discussed in detail. The framework for implementing these functions and the applications in electronics manufacturing are introduced

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI

Date of Conference:

23-25 Sep 1998

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