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How to simultaneously reduce α and β error with SPC? A multivariate process control approach

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4 Author(s)
Nasongkhla, R. ; Dept. of Ind. Eng. & Oper. Res., California Univ., Berkeley, CA, USA ; Shanthikumar, J.G. ; Nurani, R.K. ; McIntyre, M.

We describe the multivariate statistical process control approach which uses a weighted average metric as a metric plotted on a control chart. We show that the optimal weighted coefficient is a function of the mean-shift vector and covariance matrix of metrics of interest. The control chart constructed by this optimal weighted average metric will have the highest signal to noise ratio and the lowest α and β errors. A numerical example using actual data from a fab is also provided

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI

Date of Conference:

23-25 Sep 1998

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