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IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)

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The following topics were dealt with: yield modeling and analysis; overall equipment efficiency; yield enhancement strategies and techniques; harnessing and developing workforce potential; contamination free manufacturing; advanced metrology; cost reduction; photolithography and etching; interconnect technology; factory automation and WIP management; isolation and dielectric issues at 0.18 μm; factory modeling and simulation.

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI

Date of Conference:

23-25 Sept. 1998