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Integrated micro-electro-mechanical sensor development for inertial applications

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14 Author(s)
J. J. Allen ; Sandia Nat. Labs., Albuquerque, NM, USA ; R. D. Kinney ; J. Sarsfield ; M. R. Daily
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Electronic sensing circuitry and micro-electro-mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M3EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers

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IEEE Aerospace and Electronic Systems Magazine  (Volume:13 ,  Issue: 11 )