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Integrated micro-electro-mechanical sensor development for inertial applications

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14 Author(s)
Allen, J.J. ; Sandia Nat. Labs., Albuquerque, NM, USA ; Kinney, R.D. ; Sarsfield, J. ; Daily, M.R.
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Electronic sensing circuitry and micro-electro-mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M3EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers

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Aerospace and Electronic Systems Magazine, IEEE  (Volume:13 ,  Issue: 11 )