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Thin film resistance temperature sensors on GaAs

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6 Author(s)
Lalinsky, T. ; Inst. of Electr. Eng., Slovak Acad. of Sci., Bratislava, Slovakia ; Hotovy, I. ; Hascik, S. ; Mozolova, Z.
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Thin film resistance temperature sensors on GaAs has been developed as an alternative replacement to the temperature sensing Schottky diodes in the power sensor microsystem. Current-voltage and low frequency noise measurements of the temperature sensor have been carried out to analyze the sensor performances. Better noise performance of the resistance sensors compared to the Schottky one has been found

Published in:

Advanced Semiconductor Devices and Microsystems, 1998. ASDAM '98. Second International Conference on

Date of Conference:

5-7 Oct 1998