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Speed and efficiency of the PIN homojunction photodiodes on InGaAs/InP heterostructures

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4 Author(s)
Budianu, E. ; Nat. Inst. for Res. Dev. of Microtechnol., Bucharest, Romania ; Purica, M. ; Rusu, E. ; Nan, S.

In this paper we present the optimization of a PIN photodiode on A IIIBV heterostructure and technological processing for a high speed operation over a large spectral range (0.8-1.6) μm. A theoretical analysis was made taking into account the dependence of quantum efficiency and speed of response on epitaxial layers parameters of an InP/In0.53Ga0.47As/InP photodiode with absorption region separated from the p+n junction. The optimum values for structure parameters were determined for a quantum efficiency over 85% on 1.3-1.6 μm spectral range and for a fast response limited by the junction capacity. The technological processing of this type of structure by Cl-VPE epitaxial growth and Zn diffusion in InP layer led to photodiodes with responsivity of 0.7 A/W at 1.3 μm and 0.3 A/W at 0.82 μm, a rise time of 150 ps and a capacity of 1.2 pF

Published in:

Advanced Semiconductor Devices and Microsystems, 1998. ASDAM '98. Second International Conference on

Date of Conference:

5-7 Oct 1998

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