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The Implementation Of Sub-150nm Contact Hole Pattern By Resist Flow Process

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6 Author(s)
Jin-Soo Kim ; Hyundai Electronics Industries Co., Ltd. ; Chang-Il Choi ; Cheol-Kyu Bok ; Chang-Nam Ahn
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First Page of the Article

Published in:

Microprocesses and Nanotechnology Conference, 1998 International

Date of Conference:

13-16 July 1998