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Fabrication Of Nanometric Aperture Arrays By Wet Anisotropic Etching For Near-Field Optical Memory Application

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4 Author(s)
Lee, M.B. ; National Institute for Advanced Interdisciplinary Research ; Tsutsui, K. ; Ohtsu, M. ; Atoda, N.

First Page of the Article

Published in:

Microprocesses and Nanotechnology Conference, 1998 International

Date of Conference:

13-16 July 1998