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Browse Conference Publications > Microprocesses and Nanotechno ... Help

Fabrication Of Nanometer Scale Structure Using Thin Film Stress

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4 Author(s)
Park, Dong-Il ; Kyungpook National University ; Sung-Ho Hahm ; Jong-Hyun Lee ; Jung-Hee Lee

First Page of the Article

Published in:
Microprocesses and Nanotechnology Conference, 1998 International

Date of Conference: 13-16 July 1998

Page(s):
156 - 157
Print ISBN:
4-930813-83-2
Conference Location :
Kyoungju, South Korea
Digital Object Identifier :
10.1109/IMNC.1998.730021
Product Type:
Conference Publications

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