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A New Fabrication Process Of Field Emitter Arrays Using Silicon Delamination By Hydrogen Ion Implantation

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2 Author(s)
Sasaguri, D. ; Kyushu Institute of Technology ; Asano, T.

First Page of the Article

Published in:

Microprocesses and Nanotechnology Conference, 1998 International

Date of Conference:

13-16 July 1998