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High-accuracy circuits for on-chip capacitive ratio testing and sensor readout

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4 Author(s)
Bo Wang ; Dept. of Electr. & Comput. Eng., Oregon State Univ., Corvallis, OR, USA ; Tetsuya Kajita ; Tao Sun ; G. Temes

This paper presents novel CMOS switched-capacitor circuits for high-accuracy, on-chip capacitive-ratio testing and sensor readout. Using sigma-delta and correlated-double-sampling (CDS) techniques, these circuits provide accurate digitized capacitive-ratio readout. Both single-ended and fully differential circuits are presented. Simulation results show that the resolution can be as fine as 100 aF for 10 pF capacitors. Single-ended circuit and fully-differential circuits were implemented and tested. The measured standard deviation was below 20 aF when 10 pF capacitors were tested

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:47 ,  Issue: 1 )