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The performance of thin film carbon materials and carbon nanotubes as cold cathodes

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6 Author(s)
Amaratunga, Gehan A.J. ; Dept. of Electr. Eng. & Electron., Liverpool Univ., UK ; Baxendale, M. ; Rupasinghe, N. ; Munindradasa, D.A.I.
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In this work we have studied the field emission from three different types of carbon films: (i) a-C:H:N deposited using an inductively coupled rf PECVD process, where the N content in the films can be as high as 30 at%. (ii) Cathodic arc deposited tetrahedral amorphous carbon (ta-C) with embedded regions of carbon nanotube and onion structures. (iii) Unoriented carbon nanotube films on a porous substrate. These films were formed by filtering a solution of nanotubes dispersed in alcohol through the pores (0.2 um dia.) and drying.

Published in:

Vacuum Microelectronics Conference, 1998. Eleventh International

Date of Conference:

19-24 July 1998

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