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MEMS based thin film pressure/temperature sensor for on-line monitoring injection molding

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2 Author(s)
Luo, R.C. ; Dept. of Electr. Eng., Nat. Chung Cheng Univ., Chia Yi, Taiwan ; Chen, O.

Various sensors such as traditional thermocouples and pressure sensors have been used in process monitoring and control. These traditional sensors have several limitations. The authors propose a new approach for measuring information of mold's core and cavity. They also propose a fabrication process of a thin-film pressure/temperature sensor using the information from micro sensor into core and cavity to realize online monitoring

Published in:

Industrial Electronics Society, 1998. IECON '98. Proceedings of the 24th Annual Conference of the IEEE  (Volume:3 )

Date of Conference:

31 Aug-4 Sep 1998