Calibration Of Microfabricated Shear Stress Sensors

This paper reports a two-pronged research project to fabricate and calibrat micromachmed shear stress sensors for wind tunnel instrumentation. Our team has designed and fabricated both aafive and passive shear stress sensors based on polysilicon lateral resonant structures. In addition to the work at CW RU, our team has collaborated with Analog Devices to develop integrated shear stress sensors based on existing accelerometer devices and process technology. Sensors from both efforts have been tested in a macroscopic flow channel for characterization in compressible flow. Tie sensors from CWRU demonstrated a sensitivity of 9 Pa/um of floating element deflection, and the integrated sei isors had a sensitivity of 6 Pa/V.