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High Sensitive Internal Film Stress Measurement By An Improved Micromachined Indicator Structure

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4 Author(s)
Ericson, Fredric ; Uppsala University ; Greek, S. ; Soderkvist, J. ; Schweitz, Jan‐Ake

First Page of the Article

Published in:
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on  (Volume:2 )

Date of Conference: 25-29 Jun 1995

Page(s):
84 - 87
Print ISBN:
91-630-3473-5
Digital Object Identifier :
10.1109/SENSOR.1995.721750
Product Type:
Conference Publications

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