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Photonic integrated circuits fabricated using ion implantation

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14 Author(s)
Charbonneau, S. ; Inst. for Microstruct. Sci., Nat. Res. Council of Canada, Ottawa, Ont., Canada ; Koteles, E.S. ; Poole, P.J. ; He, J.J.
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Intermixing the wells and barriers of quantum-well (QW) laser heterostructures generally results in an increase in the bandgap energy and is accompanied by changes in the refractive index. A technique, based on ion implantation-induced QW intermixing, has been developed to enhance the quantum-well intermixing (QWI) rate in selected areas of a wafer. Such processes offer the prospect of a powerful and simple fabrication route for the integration of discrete optoelectronic devices and for forming photonic integrated circuits

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:4 ,  Issue: 4 )