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Flying height measurement using frustrated total reflection: determination of the reflectivities by the least-squares method

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4 Author(s)
Mori, S. ; Mech. Eng. Res. Lab., Hitachi Ltd., Ibaraki, Japan ; Sugawara, H. ; Tokisue, H. ; Kinoshita, K.

A new method for determining reflectivities in flying height measurement of a slider using frustrated total reflection (FTR) sensor is evaluated. The method is based on the fact that the reflectivity of FTR has different dependence on flying height for P-polarized light and S-polarized light. The flying height of a slider on a glass disk was measured both by an FTIP sensor using this method and by a traditional flying height tester. The results agree with each other with an error of less than 3 nm

Published in:

Magnetics, IEEE Transactions on  (Volume:34 ,  Issue: 5 )

Date of Publication:

Sep 1998

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