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Thermal Analysis And Design Of A Micro-hotplate For Integrated Gas Sensor Applications

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5 Author(s)
Fung, S.K.H. ; Hong Kong University of Science and Technology ; Zhenan Tang ; Chan, Philip C.H. ; Sin, J.K.O.
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First Page of the Article

Published in:

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on  (Volume:1 )

Date of Conference:

25-29 Jun 1995