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A Fully Integrated Surface Micromachined Pressure Sensor With Low Temperature Dependence

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5 Author(s)
Dudaicevs, H. ; Fraunhofer Institute of Microelectronic Circuits and Systems ; Manoli, Y. ; Mokwa, W. ; Schmidt, M.
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First Page of the Article

Published in:

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on  (Volume:1 )

Date of Conference:

25-29 Jun 1995