Two Dimensional Silicon Micromachined Optical Scanner Integrated With Photo Detector And Piezoresistor

The silicon micromachined optical scanner integrated with photo detectors and piezoresistor has been developed for highly miniaturized scanning type of optical sensors. The scanner is fabricated with silicon micromachining technologies including IC manufacturing methods. It is capable of scanning a light beam spot two dimensionally and photo detection with the information of where the light beam is being scanned. The scanning angle was over 40 deg. x 30 deg. and the photo sensitivity was 0.5 A/W at 680 nm wavelength.