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Browse Conference Publications > Plasma Process-Induced Damage ... Help

Inductive Damage and the Impact of RF Power and Magnetic Field During MERIE Processes

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4 Author(s)
Salah, A. ; Pennsylvania State University ; Awadelkarim, O.O. ; Chan, Y.D. ; Werking, J.

First Page of the Article

Published in:
Plasma Process-Induced Damage, 1996 1st International Symposium on

Date of Conference: 13-14 May 1996

Page(s):
131 - 132
Print ISBN:
0-9651577-0-9
Digital Object Identifier :
10.1109/PPID.1996.715220
Product Type:
Conference Publications

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